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- RIE5 - Standard Operating procedure (Cortex Software)
- RIE 1
- RIE 1 (Custom)
- RIE 2
- RIE 2 (MRC)
- RIE 3
- RIE 3 (MRC)
- RIE 5
- RIE 5 (PlasmaTherm)
- RIE 5 (PlasmaTherm SLR)
- RIE Etching Recipes
- Rapid Thermal Processor (AET RX6)
- Rapid Thermal Processor (SSI Solaris 150)
- Research
- Resistivity Mapper (CDE RESMAP)
- S-Cubed Flexi - Operating Procedure
- SEM 1 (JEOL IT800SHL)
- SEM Sample Coater (Hummer)
- SPR220-7 at 3kW various temperature without N2 gas
- STD SiO2 recipe
- Services
- SiN 100C Table-2019
- SiO2 Etching Test using CF4/CHF3
- Si Deep RIE
- Si Deep RIE (Bosch Etch)
- Silicon Deep Etcher (Plasma-Therm SLR)
- Solvent Benches
- Solvent Cleaning Benches
- Spin Coat Benches
- Spin Rinse Dryer (SemiTool)
- Sputter 1 (Custom)
- Sputter 2 (SFI Endeavor)
- Sputter 3 (AJA ATC 2000-F)
- Sputter 3 (ATC 2000-F)
- Sputter 4 (AJA ATC 2200-V)
- Sputter 4 (ATC 2200-V)
- Sputter 5
- Sputter 5 (AJA ATC 2200-V)
- Sputter 5 (Lesker AXXIS)
- Sputtering Recipes
- Staff List
- Staff Notes
- Step Profilometer (DektakXT)
- Step Profilometer (Dektak 6M)
- Step Profilometer (KLA Tencor P-7)
- Stepper 1
- Stepper 1 (GCA6300) How to select proper chuck
- Stepper 1 (GCA 6300)
- Stepper 1 (GCA 6300) - Standard Operating Procedure
- Stepper 1 (GCA 6300) Available chucks
- Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness
- Stepper 2
- Stepper 2 (AutoStep 200)
- Stepper 2 (AutoStep 200) - Operating Procedure - Piece Parts
- Stepper 2 (AutoStep 200) Operating Procedures
- Stepper 2 (Autostep 200) - Chuck Selection
- Stepper 2 (Autostep 200) - Job Programming
- Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences
- Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses
- Stepper 3 (ASML)
- Stepper 3 (ASML DUV)
- Stepper Mask-Making Guidelines (Generic)
- Stepper Recipes
- Stocked Chemical List
- Strip Annealer
- Surface Analysis (KLA/Tencor Surfscan)
- Surfscan6200 photos
- Surfscan Errors and Workarounds
- Surfscan SOP for 4inch wafers
- Surfscan SOP for 6inch wafers
- Surfscan SOP for 8inch wafers
- Surfscan SOP for small substrates
- Surfscan photo
- Suss Aligners (SUSS MJB-3)
- Suss MA-6 Backside Alignment QuickStart
- TEST PAGE
- THz Physics Presentations
- Tech Talks Seminar Series
- Tencor Flexus Film Stress
- Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher
- Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher
- Test Data of etching SiO2 with CHF3/CF4
- Test Data of etching SiO2 with CHF3/CF4-Florine
- Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher
- Test Data of etching SiO2 with CHF3/CF4-ICP1
- Test Data of etching SiO2 with CHF3/CF4/O2
- Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer)
- Test Page
- Thermal Evap 1
- Thermal Evap 2 (Solder)
- Thermal Evaporation Recipes
- Thermal Evaporator 1
- Thermal Evaporator 2
- Thermal Processing
- Thermal Processing Recipes
- Tino Sy
- Tom Reynolds
- Tony Bosch
- Tool List
- Toxic Corrosive Benches
- Troubleshooting and Recovery
- Tube Furnace (Tystar 8300)
- Tube Furnace AlGaAs Oxidation (Linberg)
- Tube Furnace AlGaAs Oxidation (Lindberg)
- Tube Furnace Wafer Bonding (Thermco)
- UCSBTEST1Gain4.jpg
- UCSB NanoFab Microscope Training
- UCSB NetID Login Troubleshooting
- UV Ozone Quick Start
- UV Ozone Reactor
- Unaxis SOP 3-12-2020.docx
- Unaxis SiN100C 300nm-2019
- Unaxis Test Recipe Page
- Unaxis VLR Etch - Process Control Data
- Unaxis VLR ICP-Etch
- Unaxis VLR ICP-PECVD
- Unaxis wafer coating procedure
- Usage Data and Statistics
- User Accessible Commands
- Vacuum Deposition
- Vacuum Deposition Recipes
- Vacuum Oven (YES)
- Vacuum Sealer
- Vapor HF Etch
- Vapor HF Etch (uETCH)
- Video Training: Hosting with Zoom and GacuhoCast/Panopto
- Video Training: Uploading to GauchoCast/Panopto (Internal)
- Video Training - Introduction (Internal)
- Vraj Mehalana
- Wafer Bonder (Logitech WBS7)
- Wafer Bonder (Logitech WSB7)
- Wafer Bonder (SUSS SB6-8E)
- Wafer Cleaver (PELCO Flip-Scribe)
- Wafer Cleaver Recipes (LSD-155LT)
- Wafer Coating Process Traveler
- Wafer Coating Process Traveler1
- Wafer Scanning/Coating Process Traveler ( combined/less detailed)
- Wafer Scanning process Traveler
- Wafer Toxic Corrosive Bench
- Wafer coating procedure
- Wafer scanning process traveler
- Wet Benches
- Wet Etching Recipes
- Wet Processing
- White-Light/Phase-Shift Interference Profilometer (Filmetrics Profilm3D)
- Wiki Admin
- Wire Saw (Takatori)
- XeF2 Etch (Xetch)
- YES-150C-Various-Resists
- YES-SPR220-Various-Temps
- YES Recipe Screenshots: STD-N2-O2
- YES Recipe Screenshots: STD-O2
