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Showing below up to 336 results in range #1 to #336.

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  1. ADT 7100 - Initial Setup Before Cutting
  2. ADT 7100 - Recovering an Old Recipe (2019)
  3. ADT UV-Tape Table 1042R
  4. ASML 5500: Choose Marks for Prealignment
  5. ASML 5500: Recovering from a Typo in Reticle ID
  6. ASML 5500: Recovering from an Error
  7. ASML DUV: Edge Bead Removal via Photolithography
  8. ASML Stepper 3: Wafer Handler Reset Procedure
  9. ASML Stepper 3 - Job Creator
  10. ASML Stepper 3 - Substrates smaller than 100mm/4-inch
  11. ASML Stepper 3 - UCSB Test Reticles
  12. ASML Stepper 3 Dicing Guide Programming
  13. ASML Stepper 3 Error Recovery, Troubleshooting and Calibration
  14. ASML Stepper 3 Standard Operating Procedure
  15. AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx
  16. AUTOSTEP 200-PIECES instruction 6-20-19.pptx
  17. Adam Abrahamsen
  18. Advanced PECVD Recipes
  19. Aidan Hopkins
  20. Ashers (Technics PEII)
  21. Atomic Force Microscope (Bruker ICON)
  22. Atomic Layer Deposition (Oxford FlexAL)
  23. Atomic Layer Deposition Recipes
  24. Automated Coat/Develop System (S-Cubed Flexi)
  25. Automated Wafer Cleaver (Loomis LSD-155LT)
  26. Autostep 200 Mask Making Guidance
  27. Autostep 200 Old training manual
  28. Autostep 200 Troubleshooting and Recovery
  29. Autostep 200 User Accessible Commands
  30. Biljana Stamenic
  31. Bill Millerski
  32. Bill Mitchell
  33. Brian Lingg
  34. Brian Thibeault
  35. CAIBE (Oxford Ion Mill)
  36. CC-PRIME OnBoarding 2022-08
  37. CDE ResMap Quick-Start instructions
  38. COVID-19 User Policies
  39. Calculators + Utilities
  40. Chemical-Mechanical Polisher (Logitech)
  41. Chemical List
  42. Chemical List - OLD 2018-09-05
  43. Claudia Gutierrez
  44. Comparison of ash rate for different gas mixtures, especially between O2 only vs O2/N2 mixture.
  45. Contact Aligner (SUSS MA-6)
  46. Contact Alignment Recipes
  47. Critical Point Dryer
  48. DS-K101-304 Bake Temp. versus Develop Rate
  49. DSEIII (PlasmaTherm/Deep Silicon Etcher)
  50. DUMMY TOOL
  51. DUV Flood Expose
  52. Dan Read
  53. Deep UV Optical Microscope (Olympus)
  54. Demis D. John
  55. Deposition Data - temporary 2021-12-15
  56. Dicing Saw (ADT)
  57. Digital Microscope (Olympus DSX1000)
  58. Direct-Write Lithography Recipes
  59. Don Freeborn
  60. Dry Etching Recipes
  61. E-BEAM
  62. E-Beam 1 (Sharon)
  63. E-Beam 2 (Custom)
  64. E-Beam 3 (Temescal)
  65. E-Beam 4 (CHA)
  66. E-Beam 5 (Plasys)
  67. E-Beam Evaporation Recipes
  68. E-Beam Lithography Recipes
  69. E-Beam Lithography System (JEOL JBX-6300FS)
  70. Editing Tutorials
  71. Electronics Presentations
  72. Ellipsometer (Rudolph)
  73. Ellipsometer (Woollam)
  74. Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement
  75. Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement
  76. Equipment Group - Video Training Procedures
  77. Errors
  78. Exposing a wafer piece
  79. FIJI - Microscope Measurement Tools
  80. Field Emission SEM 2 (JEOL IT800SHL)
  81. Film Stress (Tencor Flexus)
  82. Filmetrics F10-RT-UVX Operating Procedure
  83. Filmetrics F40-UV Microscope-Mounted
  84. Filmetrics F40-UV Quick Start
  85. Filmetrics F50 - Operating Procedure
  86. Flip-Chip Bonder (Finetech)
  87. Flood Exposure Recipes
  88. Fluorescence Microscope (Olympus MX51)
  89. Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)
  90. Focused Ion-Beam Lithography (Raith Velion)
  91. Foong Fatt
  92. Frequently Asked Questions
  93. GCA 6300 Mask Making Guidance
  94. GCA 6300 Reboot Procedures
  95. GCA 6300 USer Accessible Commands
  96. GCA 6300 training manual -old instructions
  97. GCA Old full training manual
  98. Glossary
  99. GoPro Hero8 Black (Internal)
  100. Gold Plating Bench
  101. Gold surface oxidation (darkening) due to O2/N2 plasma; the need for O2 only recipe.
  102. Goniometer (Rame-Hart A-100) - Operating Procedure
  103. HF Vapor Etch
  104. High Temp Oven (Blue M)
  105. Holographic Lith/PL Setup (Custom)
  106. Homepage Draft1
  107. Hummer SEM Sample Coater - Techniques to reduce charging in SEMs
  108. IBD: Calibrating Optical Thickness
  109. ICP-Etch (Unaxis VLR)
  110. ICP-PECVD (Unaxis VLR)
  111. ICP Etch 1 (Panasonic E646V)
  112. ICP Etch 2 (Panasonic E626I)
  113. ICP Etching Recipes
  114. IR Aligner (SUSS MJB-3 IR)
  115. IR Thermal Microscope (QFI)
  116. InP Etch Rate and Selectivity (InP/SiO2)
  117. InP Etch Test-in details
  118. InP Etch Test Result in Details
  119. InP Etch test -details
  120. InP etch result in details
  121. Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers
  122. Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers
  123. Ion Beam Deposition (Veeco NEXUS)
  124. Jack Whaley
  125. KLA Tencor P7 - Basic profile instructions
  126. KLA Tencor P7 - Saving Profile Data
  127. KLayout Design Tips
  128. Lab Rules
  129. Lab Rules OLD 2018
  130. Lab Rules backup
  131. Laser Etch Monitor Simulation in Python
  132. Laser Etch Monitoring
  133. Laser Scanning Confocal M-scope (Olympus LEXT)
  134. Lee Sawyer
  135. LegacyTable
  136. Lift-Off with DUV Imaging + PMGI Underlayer
  137. Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer
  138. Lithography Recipes
  139. Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond
  140. Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick
  141. Luis Zuzunaga
  142. MA6 Backside Alignment - Allowed Mark Locations
  143. MLA150 - CAD Files and Templates
  144. MLA150 - Design Guidelines
  145. MLA150 - Large Image GDS Generation
  146. MLA150 - Troubleshooting
  147. MLA Recipes
  148. MVD - Wafer Coating - Process Traveler
  149. Main Page
  150. Main Page mod
  151. Maskless Aligner (Heidelberg MLA150)
  152. Measurements and Imaging with Amscope Camera - Quickstart Usage Guide
  153. Mechanical Polisher (Allied)
  154. Michael Barreraz
  155. Microscopes
  156. Mike Day
  157. Mike Silva
  158. Molecular Vapor Deposition
  159. Molecular Vapor Deposition Recipes
  160. Nano-Imprint (Nanonex NX2000)
  161. NanoFab Process Group
  162. Nanofab-IT - Add Device to Network
  163. Nanofab Job Postings
  164. Nanofab New User Onboarding
  165. Nanofab Staff Internal Pages
  166. News Feed
  167. Nick test
  168. Ning Cao
  169. OLD - PECVD2 Recipes
  170. Old Deposition Data - 2021-12-15
  171. Old Deposition Data - NastaziaM 2021-11-22
  172. Old Training Manual
  173. Old training manual
  174. Older Publications
  175. Olympus LEXT OLS4000 Confocal uScope - Quick Start
  176. Operating Instructions
  177. Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)
  178. Optical Film Thickness & Wafer-Mapping (Filmetrics F50)
  179. Optical Film Thickness (Filmetrics)
  180. Optical Film Thickness (Nanometric)
  181. Other Dry Etching Recipes
  182. Oven 4 (Thermo-Fisher HeraTherm)
  183. Oven 5 (Labline)
  184. Ovens - Overview of All Lab Ovens
  185. Ovens 1, 2 & 3 (Labline)
  186. Oxford Etcher - Sample Size Effect on Etch Rate
  187. Oxford ICP Etcher (PlasmaPro 100 Cobra)
  188. Oxford ICP Etcher - Process Control Data
  189. Oxygen Plasma System Recipes
  190. PECV1 Wafer Coating Process Traveler
  191. PECVD.docx
  192. PECVD1-(PlasmaTherm 790)
  193. PECVD1-SIN Standard Recipe (PlasmaTherm 790)
  194. PECVD1-SiN-standard recipe.pdf
  195. PECVD1-SiN standard recipe.pdf
  196. PECVD1 Operating Instructions.pdf
  197. PECVD1 Recipes
  198. PECVD1 Wafer Coating Process
  199. PECVD1 Wafer Coating Process Traveler
  200. PECVD 1 (PlasmaTherm 790)
  201. PECVD 2 (Advanced Vacuum)
  202. PECVD Recipes
  203. Packaging Recipes
  204. Peder Lenvik
  205. Photolithography - Improving Adhesion Photoresist Adhesion
  206. Photolithography - Manual Edge-Bead Removal Techniques
  207. Photoluminescence PL Setup (Custom)
  208. Photomask Ordering Procedure for UCSB Users
  209. Photonics Presentations
  210. Plasma Activation (EVG 810)
  211. Plasma Clean (Gasonics 2000)
  212. Plasma Clean (YES EcoClean)
  213. Probe Station: I-V Curves with Keithley 2400 and Python Script
  214. Probe Station & Curve Tracer
  215. ProcessGroup: Shipping Samples on Dicing Tape+Frame
  216. Process Group - Billing Instructions
  217. Process Group - Lab Stocking/Supplies Tasks
  218. Process Group - Process Control Data
  219. Process Group - Remote Fabrication Jobs
  220. Programming a Job
  221. PubList2018
  222. Publications - 2013-2014
  223. RIE5 - Standard Operating procedure (Cortex Software)
  224. RIE 1 (Custom)
  225. RIE 2 (MRC)
  226. RIE 3 (MRC)
  227. RIE 5 (PlasmaTherm)
  228. RIE Etching Recipes
  229. Rapid Thermal Processor (AET RX6)
  230. Rapid Thermal Processor (SSI Solaris 150)
  231. Research
  232. Resistivity Mapper (CDE RESMAP)
  233. S-Cubed Flexi - Operating Procedure
  234. SEM 1 (JEOL IT800SHL)
  235. SEM Sample Coater (Hummer)
  236. SPR220-7 at 3kW various temperature without N2 gas
  237. STD SiO2 recipe
  238. Services
  239. SiN 100C Table-2019
  240. SiO2 Etching Test using CF4/CHF3
  241. Spin Rinse Dryer (SemiTool)
  242. Sputter 1 (Custom)
  243. Sputter 2 (SFI Endeavor)
  244. Sputter 3 (AJA ATC 2000-F)
  245. Sputter 4 (AJA ATC 2200-V)
  246. Sputter 5
  247. Sputter 5 (AJA ATC 2200-V)
  248. Sputtering Recipes
  249. Staff List
  250. Step Profilometer (DektakXT)
  251. Step Profilometer (KLA Tencor P-7)
  252. Stepper 1 (GCA6300) How to select proper chuck
  253. Stepper 1 (GCA 6300)
  254. Stepper 1 (GCA 6300) - Standard Operating Procedure
  255. Stepper 1 (GCA 6300) Available chucks
  256. Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness
  257. Stepper 2 (AutoStep 200)
  258. Stepper 2 (AutoStep 200) - Operating Procedure - Piece Parts
  259. Stepper 2 (AutoStep 200) Operating Procedures
  260. Stepper 2 (Autostep 200) - Chuck Selection
  261. Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences
  262. Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses
  263. Stepper 3 (ASML DUV)
  264. Stepper Recipes
  265. Stocked Chemical List
  266. Strip Annealer
  267. Surface Analysis (KLA/Tencor Surfscan)
  268. Surfscan6200 photos
  269. Surfscan Errors and Workarounds
  270. Surfscan photo
  271. Suss Aligners (SUSS MJB-3)
  272. Suss MA-6 Backside Alignment QuickStart
  273. TEST PAGE
  274. THz Physics Presentations
  275. Tech Talks Seminar Series
  276. Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher
  277. Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher
  278. Test Data of etching SiO2 with CHF3/CF4
  279. Test Data of etching SiO2 with CHF3/CF4-Florine
  280. Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher
  281. Test Data of etching SiO2 with CHF3/CF4-ICP1
  282. Test Data of etching SiO2 with CHF3/CF4/O2
  283. Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer)
  284. Test Page
  285. Thermal Evap 1
  286. Thermal Evap 2 (Solder)
  287. Thermal Evaporation Recipes
  288. Thermal Evaporator 1
  289. Thermal Evaporator 2
  290. Thermal Processing Recipes
  291. Tino Sy
  292. Tom Reynolds
  293. Tony Bosch
  294. Tool List
  295. Troubleshooting and Recovery
  296. Tube Furnace (Tystar 8300)
  297. Tube Furnace AlGaAs Oxidation (Lindberg)
  298. Tube Furnace Wafer Bonding (Thermco)
  299. UCSBTEST1Gain4.jpg
  300. UCSB NanoFab Microscope Training
  301. UV Ozone Quick Start
  302. UV Ozone Reactor
  303. Unaxis SOP 3-12-2020.docx
  304. Unaxis SiN100C 300nm-2019
  305. Unaxis Test Recipe Page
  306. Unaxis VLR Etch - Process Control Data
  307. Unaxis wafer coating procedure
  308. Usage Data and Statistics
  309. User Accessible Commands
  310. Vacuum Deposition Recipes
  311. Vacuum Oven (YES)
  312. Vacuum Sealer
  313. Vapor HF Etch
  314. Vapor HF Etch (uETCH)
  315. Video Training: Hosting with Zoom and GacuhoCast/Panopto
  316. Video Training: Uploading to GauchoCast/Panopto (Internal)
  317. Video Training - Introduction (Internal)
  318. Vraj Mehalana
  319. Wafer Bonder (Logitech WBS7)
  320. Wafer Bonder (SUSS SB6-8E)
  321. Wafer Cleaver (PELCO Flip-Scribe)
  322. Wafer Cleaver Recipes (LSD-155LT)
  323. Wafer Coating Process Traveler
  324. Wafer Coating Process Traveler1
  325. Wafer Scanning/Coating Process Traveler ( combined/less detailed)
  326. Wafer Scanning process Traveler
  327. Wafer coating procedure
  328. Wafer scanning process traveler
  329. Wet Benches
  330. Wet Etching Recipes
  331. Wire Saw (Takatori)
  332. XeF2 Etch (Xetch)
  333. YES-150C-Various-Resists
  334. YES-SPR220-Various-Temps
  335. YES Recipe Screenshots: STD-N2-O2
  336. YES Recipe Screenshots: STD-O2

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